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宽幅SPK-410Z（8000电源）列表图1.png

SPK-410ZWide-width intermediate frequency plasma cleaner

Using Shengding's patented intermediate frequency digital power supply to ensure uniform plasma and stable processing
SPV-24M①.png

SPV-24MMicrowave In-Line Vacuum Plasma Cleaner

Microwave in-line vacuum plasma cleaning machine specially designed for the semiconductor industry, for semiconductor chip bonding pretreatment, plastic sealing pretreatment, photoresist removal, metal bonding pretreatment. The plasma is not charged
SPMV-100H列表图片.png

SPMV-100HCavity microwave vacuum plasma cleaner

The plasma of free radical molecules has no bias, will not cause electrical damage to the product, and the degumming rate is high
USC-VPV干式超声波清洗机

USC-VPV dry ultrasonic dust removal cleaning machine

Quickly and effectively remove floating particles on the surface of the product, 97% removal rate of 3um dust particles, 98% removal rate of 6um dust particles
USC干式超声波列表图片.png

USC Dry Ultrasonic Dust Cleaning Machine

Quickly and effectively remove floating particles on the surface of the product, the removal rate of 3μm dust particles is 97%, and the removal rate of 6μm dust particles is 98%
离子静电消除装置列表图片.png

DMA-100Ion anti-static air nozzle

0.9S high-efficiency static elimination, gas-electric separation structure, support 485 communication interface, can be connected to MES system
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